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SEMI S10: Safety Guidelines for Risk Assessment Processes

SEMI S10: Safety Guidelines for Risk Assessment Processes

Introducing safety guidelines for the risk assessment and risk evaluation process.

The purpose of "SEMI S10" is to establish general principles for risk assessment to identify hazards, estimate risks, and evaluate risks in a consistent and practical manner. Additionally, by using "SEMI S10," it helps determine the degree of risk and develop measures to control that risk. 【Example of Risk Assessment】 ■ Conducted a risk assessment at a wafer transport equipment manufacturer ■ Identified the hazard of crushing by robots within the wafer transport equipment and estimated it as risk rank 2C ■ Referenced SEMI S2 for risk reduction measures and added a door interlock function ■ Concluded with a risk rank of "none" *For more details, please refer to the PDF document or feel free to contact us.

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SEMI S1: Safety Guidelines for Equipment Safety Labels

SEMI S1: Safety Guidelines for Equipment Safety Labels

Provide guidance on the content and format of device safety labels (warning labels).

"SEMI S1" provides guidance on the content and format of equipment safety labels (warning labels) and gives examples of symbols to be used. Warning labels typically convey information about "specific sources of danger." [What Warning Labels Should Convey] ■ Severity of the hazard - Classified into four signal words: DANGER, WARNING, CAUTION, and NOTICE - The classification method is also valid according to SEMI S10 risk assessment ■ Types of hazards - Types of hazards such as electric shock or entrapment - Represented by symbols, text, or both ■ Consequences of hazards - In the case of electric shock, burns or death may be considered, and these should be clearly stated ■ Methods to avoid hazards - The most effective measure against electric shock is to turn off the power, so this wording should be clearly stated *For more details, please refer to the PDF document or feel free to contact us.

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SEMI S6: Safety Guidelines for Ventilation

SEMI S6: Safety Guidelines for Ventilation

Conducting tracer gas tests, CIH, and non-flammability tests related to SEMI S6!

"SEMI S6" is a guideline for environmental, health, and safety concerning exhaust ventilation. While "SEMI S2" includes regulations on chemicals, exhaust ventilation, and the environment, equipment that uses flammable or toxic gases and liquids in the process may require evaluation under "SEMI S6." In cases where toxic gases may be generated, simulations are conducted to confirm that there is no human exposure due to exhaust ventilation during normal operation, maintenance, and single failure scenarios. In cases where flammable gases may be generated, simulations are conducted to ensure that gases do not accumulate around electrical components. At QSES, we conduct tracer gas tests, CIH, and non-flammability tests related to S6. [Features] ■ Guidelines for environmental, health, and safety concerning exhaust ventilation ■ Equipment that uses flammable or toxic gases and liquids in the process may require evaluation under SEMI S6 *For more details, please refer to the PDF materials or feel free to contact us.

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SEMI S2: Guidelines for Environment, Health, and Safety

SEMI S2: Guidelines for Environment, Health, and Safety

Introducing some guidelines related to environment, health, and safety, such as safety interlocks.

The "SEMI S2" outlines the minimum considerations that must be taken into account regarding the working environment, hygiene, and safety for equipment used in semiconductor manufacturing. The requirements cover areas such as chemicals, radiation, electricity, physics, mechanics, environment, fire, earthquakes, exhaust, ergonomics, as well as quality, documentation, and manuals. "The safety interlock should automatically bring the equipment or related parts to a safe state when activated. (11.3)" ⇒ Example: Opening the door during operation will cause the equipment to lose power. Additionally, the equipment will not regain power until the door is closed. "The safety interlock system must be fault-tolerant, (continued) (11.5)" ⇒ Fault tolerance means that it operates safely in the event of a reasonably foreseeable single failure. The above is just a small example from SEMI S2. *For more details, please refer to the PDF document or feel free to contact us.

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SEMI S8: Safety Guidelines for Human Engineering

SEMI S8: Safety Guidelines for Human Engineering

In addition to the requirements related to ergonomics, we would like to introduce some more detailed guidelines on ergonomics.

The "SEMI S8" provides more detailed ergonomic guidelines in addition to the 16 ergonomic requirements of the SEMI S2. Here is one example. "Section 8" specifies the display position. The height regulation from the floor to the centerline of the screen, excluding the touch screen for operators standing, is as follows. (8.1.1) ■ Maximum: 1470mm (58 inches) ■ Minimum: 1320mm (52 inches) *For more details, please refer to the PDF document or feel free to contact us.

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SEMI S14: Safety Guidelines for Fire Risk Assessment and Mitigation

SEMI S14: Safety Guidelines for Fire Risk Assessment and Mitigation

Safety guidelines for fire risk assessment and mitigation for semiconductor manufacturing equipment.

"SEMI S14" provides considerations that assist in assessing and mitigating the risks of fire and combustion by-products related to equipment and products. It applies to asset protection but not to human protection. In the "SEMI S10" risk assessment, the fire risk assessment for equipment is delegated to "SEMI S14." On the other hand, it is recommended to use the methods from SEMI S10 for estimating risks. As a fundamental premise, it identifies the three elements of fire: fuel, oxidizer, and ignition source. By removing one or more of these three elements, the fire risk can be eliminated. It provides detailed descriptions of the considerations to be taken into account when conducting risk assessments regarding fuel, oxidizers, and ignition sources. *For more details, please refer to the PDF document or feel free to contact us.*

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